Miniature Optical Position Sensor
Gary Parr | June 22, 2017
The ZPS absolute-position measurement system with ultra-compact optical sensor technology allows high-precision measurement and positional control for advanced applications, such as deformable optics, lens positioning systems, and fine-stage control. Providing measurements on as many as 64 synchronized channels, the sensor generates virtually no heat and is insensitive to electromagnetic interference, achieving measurement resolution of 0.01 nm with better than 1 nm/day measurement stability.
Zygo Corp.
Middlefield, CT
zygo.com
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